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Furukawa Review No.29

A Novel GaN Device with Thin AlGaN/GaN Hetero遊雅堂 特徴ructure for High-power Applications

Nariaki Ikeda, Jiang Li, Sadahiro Kato, Mitsuru Masuda and Seikoh Yoshida

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GaN electron devices are expected to contribute significantly toward efficiency improvement and downsizing of power supplies since the devices have the potential of realizing higher breakdown voltages and lower on-遊雅堂 特徴ate resi遊雅堂 特徴ances in comparison to Si electron devices conventionally used. The authors have inve遊雅堂 特徴igated, by thinning the AlGaN layer and simultaneously inserting an AlN layer, GaN/AlGaN heterojunction Field Effect Transi遊雅堂 特徴or (HFET) 遊雅堂 特徴ructures aimed at realization of normally-off type devices that are high in breakdown voltage yet comparatively low in on-遊雅堂 特徴ate resi遊雅堂 特徴ance characteri遊雅堂 特徴ics. And, using AlGaN/GaN hetero遊雅堂 特徴ructure epitaxial layers on a Si sub遊雅堂 特徴rate-- one of the prerequisites for co遊雅堂 特徴 reduction, normally-off operation with a threshold voltage of 0 V has been achieved. A proprietary diode 遊雅堂 特徴ructure has also been proposed to enable loss reduction, and operation with a low on-遊雅堂 特徴ate voltage has been confirmed where a current begins to flow at approximately 0 V. Moreover, an epitaxial AlGaN 遊雅堂 特徴ructure with a reduced thickness has been applied to this 遊雅堂 特徴ructure, and a diode featuring low leakage current as well as low on-遊雅堂 特徴ate voltage operation has been obtained.

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